The Promis-A Station is our best-selling automated universal station. With this tool we are able to run a wide range of applications. These range from inspection and deep-learning tasks to classic metrology measurements, such as CD and overlay measurements or thin-film measurement. And all of this with one system.
The Promis-A Station is equipped with two loadports, a pre-aligner, a dual-arm robot for fast handling of wafers and an INM200 microscope or something comparable.
According to customer requirements and the different inspection or metrology applications the station will be individually adapted and can be integrated into a SECS/GEM environment.
Thanks to our modular design approach, we can offer our customers different solutions on one station. A macro-edge inspection can be integrated into the pre-aligner, or the microscope can be optimized with our own automatic filter station. With special adaptations the microscope can perform thin film measurements.
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