| Adaptation Wafer Handling System |  | to inspection microscopes. We adapt new Nikon handling systems to used microscopes. The microscope may thereby also be provided by the customer.
Price on request ProMicron 24 Bachmühlweg 74366 Kirchheim /Neckar
Telephone: +49 7143 - 40560
Fax: +49 7143 - 405615
Email: info@promicron.com
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We adapt wafer-loaders on one shared base plate for both microscope and loader. The loader puts the wafer on the arm of the stage, where the operator can inspect it. The stage can be transported in xy-direction and the wafer can be turned by the operator. We synchronise both devices exactly and adjust the handover position accurately. The vacuum switches etc. are thoroughly tuned. If desired, the wafer loader can be customized directly for the customer's wafer. |
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Please feel free to contact us for further information. |
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