Measuring microscopes for large magnifications and large measuring ranges often do not have enough stiffness. Oscillation amplitudes of 0,5 µm already have disastrous results when the depth of focus is about 0,8 µm (typical for lenses 100x/0,9). This solution allows measuring ranges of about 300mm in y-direction with a magnification of up to 1000x. The basis is a very massive stand of granite and the extremely stiff version of the focus carriage, to which the light but oscillation-free DMR-head is mounted. The system is predestinated for challenging measuring tasks in the field of semi-conductors or sensors or for the solarcell production and display technology. Example equipment list microscope head Leica DMR: Incident light module RF4 Reflector BF/DF Aperture module RF Trinocular tube Ocular L-PLAN 10x/25 for wearers of glasses Objectives: - plan Fluotar 2.5x (overview objective for bright field) - plan 5x/0.15 BD -/D 12.2 - plan 10x/0.30 BD -/D 11.0 - plan 20x/0.50 BD 0/D 1.27 - plan 50x/0.80 BD 0/D 0.5 - plan Fluotar 100x/0.90 BD 0/D 0.3 - equipment for DIC (differential interference contrast) Additionally available: measuring stages: motor driven or manual, measuring ranges 100 x 100 mm up to 300 x 300 mm. 
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