Inspection Systems

• infrared microscopy for inspection and measurement of buried structures
• inspection of bonded wafers

• overlay measurement e.g. against alignment patterns at surface

• silicon membrane and air cavern thickness measurements

• For customized semi and fully automated inspection and measurement tasks a standardized, modular software solution is now available.

The microscope control software (mcs) comprises use-oriented modules for various branches as semiconductor, automotive, energy, research and development and medical technology. The modular approach spares your purse and allows customized solutions. The integration or update of your available hardware components is also possible.