HMR - automatic thin film measurement system with microscope and optional waferloader

Based on a fibre optical spectrometer of Mikropack and an automatic high-end microscope INM200 a highly efficient system for thin film (between 50 nm and 70µm) measurement was realized.
Features 400-800 mm spectral range Minimum size of measurement spot approximately 4µm High reproducibility Simultaneous measuring Wafer transport, fast secure and contamination-free fiber miniature spectrometer without moving parts Mapping for thickness, reflectivity and refractive index 2D/3D mapping Automatic high performance microscope High precision X/Y positioning Real time laser autofocus Wafer sizes 100mm to 200mm d Smallest seize of measuring point 4µm Film thickness distribution in 2D and 3D Cleanroom class 1 compatible Real time laser auto fokus Easy operation High reliability	surface of a thinfilm measurement
mcs is multifunctional and thus suitable for several tasks manual inspection and review CD-measurement, structure measurement, automatic surface inspection contact-free layer thickness measurement pattern recognition for automatic measurement and inspection macro inspection with image and results database ...a system flexible and modular with plug in interface to customize its functions special features export functions preconfigured measuring processes and much more ...easy to integrate in process structures various import and export possibilities for measuring processes mapping and image processing data reporting with statistics, graphs and export of results in several formats (ASCII, XML, Excel, HTML...) mcs connects... automated microscopes with high performance measuring processes and contrast methods application specified camera systems interferometric and confocal sensors motorized xy stages wafer loader / sorter wafer ID reader for fully automated processes ink systems for physical and virtual inking	Fibre sensor
and offers comprehensive user support such as a comfortable assistant function in order to teach-in measuring and inspection programs quickly and easily interactive map-view with position display or direct positioning of the xy stage exact navigation via mouse click in the live image comprehensive documentation with image and results data archive for time-delayed off-line analysis.
Fully automatic / Precise and efficient / High throughput / Simultaneous measurements / Refractive index measurement / Programmable material catalog / 2D/3D mapping / Motorized xy-stage / Fibre spectrometer without moving parts / Wafer transport: fast, safe and contamination-free / Modular / Optional functions: Wafer inspection and defect review
Field of application semiconductor industry photoresist oxides nitrides surface coating anti reflex layer filters; filter bed coating display production cell gaps polyimides ITO layers	MCS-TFM in combination with a DM6000 microscope

MCS - TFM -fully automatic thin film measurement system with microscope and optional waferloader