For customized semi and fully automated inspection and measurement tasks a standardized, modular software solution is now available:The microscope control software (mcs).
MCS connects...
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automated microscopes with high performance measuring processes
and contrast methods
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application specified camera systems
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interferometric and confocal sensors
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motorized xy stages
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wafer loader / sorter
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wafer ID reader for fully automated processes
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ink systems for physical and virtual inking
