| Automatic Thin Film Measuring - Measuring System with Microscope, Optional Wafer Handling |  | Our partner Mikropack's optical fibre miniature spectrometer Nanocalc(measuring mode: white light reflectometry)
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The measuring system that sets new standards:
- Fully automated
- Accurate and efficient
- High capacity
- Simultaneous measurements
- Refractive index measurement
- Programmable materials catalog
- 2D/3D Mapping
- Motorized xy-stage
- Miniature fiber-spectrometer with no moving parts
- Wafer transport: fast, secure and free of contamination
- Modular design
- High reproducibility
- 400-800nm spectral scope
- smallest size of the measuring spot 4µm
- Layer thickness distribution in 2D and 3D
- Automatic high-performance microscope
- High precision in x/y positioning
- Real-time laser auto-focus
- Wafer size from 100mm to 200mm diameter
- Compatible with clean room class 1
- Simple handling
- High reliability
Optional features:
- Wafer inspection and defect review
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MCS-TFM in combination with Leica DM6000 microscope |
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Field of applications:
Wafer Industry
- Photoresists
- Oxides
- Nitrides
Surface coatings
- Anti-reflection coatings
- Filters, filter layers
- Protective layers
Display production
- Cell Gap
- Polyimide
- ITO layers
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User Interface of Layer Thickness Measurement |
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