| CoolBox Coax Maxi |  | Coaxial incident lighting for bright field, perfect for close-ups of wafers and other reflecting surfaces
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To check wafers for defects and inked dies, an image of the surface without reflections is needed. With the new Promicron coolBox Coax you will have the whole wafer on only one picture. Suitable for sizes up to 250x250mm.
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Most of the time camera shots of wafer surfaces are little helpful since most of the surface are plane and therefore appear highly reflective. Thus, not the surface itself, but the camera or similar environmental objects and their reflections will be in the pictures.
For high-resolution pictures of wafers and other reflective surfaces the Promicron coolbox Coax using the ONE-SHOT was developed. Macroscopes and cameras can be equipped with the new technique to record reflective surfaces without distracting artifacts on the picture. Through a mirror plate on the side,the object is illuminated laminarily and disturbing reflections are avoided. |
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The coolbox Coax is mounted to the stand of the camera and can be adjusted in height. Depending on your requirements, the camera used can also be adjusted in height by an adapter. The illumination is provided by a lateral bright field, which can be adjusted depending on personal needs and preferences. The coolbox Coax is available in two standard sizes: coolBox Coax mini, base 100x100mm,
coolBox Coax maxi, base 250x250mm Can be adjusted as needed. For a better demonstration, the illustration on the left is without illumination. | | |
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